JPH0543090B2 - - Google Patents

Info

Publication number
JPH0543090B2
JPH0543090B2 JP20508985A JP20508985A JPH0543090B2 JP H0543090 B2 JPH0543090 B2 JP H0543090B2 JP 20508985 A JP20508985 A JP 20508985A JP 20508985 A JP20508985 A JP 20508985A JP H0543090 B2 JPH0543090 B2 JP H0543090B2
Authority
JP
Japan
Prior art keywords
light beam
scanning
optical system
lens
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP20508985A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6265011A (ja
Inventor
Masaru Noguchi
Hiromi Ishikawa
Masashi Yamamoto
Hiromitsu Yamakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujinon Corp
Fujifilm Holdings Corp
Original Assignee
Fujinon Corp
Fuji Photo Film Co Ltd
Fuji Photo Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujinon Corp, Fuji Photo Film Co Ltd, Fuji Photo Optical Co Ltd filed Critical Fujinon Corp
Priority to JP20508985A priority Critical patent/JPS6265011A/ja
Publication of JPS6265011A publication Critical patent/JPS6265011A/ja
Publication of JPH0543090B2 publication Critical patent/JPH0543090B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Lenses (AREA)
JP20508985A 1985-09-17 1985-09-17 光ビ−ム走査光学系 Granted JPS6265011A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20508985A JPS6265011A (ja) 1985-09-17 1985-09-17 光ビ−ム走査光学系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20508985A JPS6265011A (ja) 1985-09-17 1985-09-17 光ビ−ム走査光学系

Publications (2)

Publication Number Publication Date
JPS6265011A JPS6265011A (ja) 1987-03-24
JPH0543090B2 true JPH0543090B2 (en]) 1993-06-30

Family

ID=16501243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20508985A Granted JPS6265011A (ja) 1985-09-17 1985-09-17 光ビ−ム走査光学系

Country Status (1)

Country Link
JP (1) JPS6265011A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63313114A (ja) * 1987-06-17 1988-12-21 Copal Electron Co Ltd 走査光学系
JPH0727126B2 (ja) * 1987-07-23 1995-03-29 株式会社日立製作所 光走査装置
JP2013116488A (ja) * 2011-12-04 2013-06-13 Kiyoyuki Kondo ビーム加工装置及びそれを用いた基板の加工方法

Also Published As

Publication number Publication date
JPS6265011A (ja) 1987-03-24

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